Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613691 | Highly selective oxide etch process using hexafluorobutadiene | Raymond Hung, Hongching Shan, Ruiping Wang, Gerald Yin | 2003-09-02 |
| 6602434 | Process for etching oxide using hexafluorobutadiene or related fluorocarbons and manifesting a wide process window | Hoiman Hung, Hongqing Shan, Ruiping Wang, Gerald Yin | 2003-08-05 |
| 6544429 | Enhancement of silicon oxide etch rate and substrate selectivity with xenon addition | Hoiman Hung, Hongchin Shan, Kenneth S. Collins, Chunshi Cui, Michael R. Rice | 2003-04-08 |