Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613691 | Highly selective oxide etch process using hexafluorobutadiene | Raymond Hung, Joseph P. Caulfield, Hongching Shan, Gerald Yin | 2003-09-02 |
| 6602434 | Process for etching oxide using hexafluorobutadiene or related fluorocarbons and manifesting a wide process window | Hoiman Hung, Joseph P. Caulfield, Hongqing Shan, Gerald Yin | 2003-08-05 |
| 6521566 | Mixed oxide solid solutions | Scott A. Magno, Eric G. Derouane | 2003-02-18 |