Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647918 | Double slit-valve doors for plasma processing | Homgqing Shan, Paul Luscher, Evans Lee, James D. Carducci, Siamak Salimian | 2003-11-18 |
| 6592673 | Apparatus and method for detecting a presence or position of a substrate | Harald Herchen | 2003-07-15 |
| 6534417 | Method and apparatus for etching photomasks | Brigitte Stoehr | 2003-03-18 |
| 6513452 | Adjusting DC bias voltage in plasma chamber | Hongching Shan, Evans Lee, Robert Wu, Bryan Pu, Paul Luscher +2 more | 2003-02-04 |