Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647918 | Double slit-valve doors for plasma processing | Michael Welch, Homgqing Shan, Evans Lee, James D. Carducci, Siamak Salimian | 2003-11-18 |
| 6589361 | Configurable single substrate wet-dry integrated cluster cleaner | James D. Carducci, Siamak Salimian | 2003-07-08 |
| 6575622 | Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe | Hamid Norrbakhsh, Mike Welch, Siamak Salimian, Brad L. Mays | 2003-06-10 |
| 6535779 | Apparatus and method for endpoint control and plasma monitoring | Manush Birang, Gregory L. Kolte, Terry Doyle, Nils Johansson, Leonid Poslavsky | 2003-03-18 |
| 6513452 | Adjusting DC bias voltage in plasma chamber | Hongching Shan, Evans Lee, Michael Welch, Robert Wu, Bryan Pu +2 more | 2003-02-04 |