Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649075 | Method and apparatus for measuring etch uniformity of a semiconductor wafer | Melisa Buie, Jennifer Leigh Lewis | 2003-11-18 |
| 6535779 | Apparatus and method for endpoint control and plasma monitoring | Manush Birang, Gregory L. Kolte, Terry Doyle, Nils Johansson, Paul Luscher | 2003-03-18 |