Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537133 | Method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Allan Gleason | 2003-03-25 |
| 6535779 | Apparatus and method for endpoint control and plasma monitoring | Manush Birang, Gregory L. Kolte, Terry Doyle, Paul Luscher, Leonid Poslavsky | 2003-03-18 |