Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647918 | Double slit-valve doors for plasma processing | Michael Welch, Paul Luscher, Evans Lee, James D. Carducci, Siamak Salimian | 2003-11-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647918 | Double slit-valve doors for plasma processing | Michael Welch, Paul Luscher, Evans Lee, James D. Carducci, Siamak Salimian | 2003-11-18 |