Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605177 | Substrate support with gas feed-through and method | Richard R. Mett, Robert Greenway | 2003-08-12 |
| 6586886 | Gas distribution plate electrode for a plasma reactor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao +3 more | 2003-07-01 |
| 6562189 | Plasma reactor with a tri-magnet plasma confinement apparatus | Efrain Quiles, James D. Carducci | 2003-05-13 |