Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605177 | Substrate support with gas feed-through and method | Richard R. Mett, Hamid Noorbakhsh | 2003-08-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605177 | Substrate support with gas feed-through and method | Richard R. Mett, Hamid Noorbakhsh | 2003-08-12 |