Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596343 | Method and apparatus for processing semiconductor substrates with hydroxyl radicals | Himanshu Pokharna, Shankar Chandran, Srinivas D. Nemani, Francimar Campana, Ellie Yieh +1 more | 2003-07-22 |
| 6591850 | Method and apparatus for fluid flow control | Juan Carlos Rocha-Alvarez, Shankar Venkataraman | 2003-07-15 |
| 6506994 | Low profile thick film heaters in multi-slot bake chamber | Yen-Kun Wang, Mark Fodor, Himanshu Pokharna, Son T. Nguyen, Kelly Fong +1 more | 2003-01-14 |