Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596343 | Method and apparatus for processing semiconductor substrates with hydroxyl radicals | Himanshu Pokharna, Srinivas D. Nemani, Chen-An Chen, Francimar Campana, Ellie Yieh +1 more | 2003-07-22 |
| 6514882 | Aggregate dielectric layer to reduce nitride consumption | Kevin Mukai | 2003-02-04 |