Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596343 | Method and apparatus for processing semiconductor substrates with hydroxyl radicals | Himanshu Pokharna, Shankar Chandran, Chen-An Chen, Francimar Campana, Ellie Yieh +1 more | 2003-07-22 |
| 6589888 | Dual frequency plasma enhanced chemical vapor deposition of silicon carbide layers | Li-Qun Xia, Ellie Yieh | 2003-07-08 |
| 6537733 | Method of depositing low dielectric constant silicon carbide layers | Francimar Campana, Michael Chapin, Shankar Venkataraman | 2003-03-25 |
| 6531398 | Method of depositing organosillicate layers | Frederic Gaillard, Li-Qun Xia, Ellie Yieh, Paul Fisher | 2003-03-11 |
| 6511924 | Method of forming a silicon oxide layer on a substrate | Kevin Mukai | 2003-01-28 |