Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599574 | Method and apparatus for forming a dielectric film using helium as a carrier gas | Ellie Yieh, Paul Edward Gee, Li-Qun Xia, Shankar Venkataranan, Dana Tribula +1 more | 2003-07-29 |
| 6596343 | Method and apparatus for processing semiconductor substrates with hydroxyl radicals | Himanshu Pokharna, Shankar Chandran, Srinivas D. Nemani, Chen-An Chen, Ellie Yieh +1 more | 2003-07-22 |
| 6537733 | Method of depositing low dielectric constant silicon carbide layers | Srinivas D. Nemani, Michael Chapin, Shankar Venkataraman | 2003-03-25 |