Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6591850 | Method and apparatus for fluid flow control | Juan Carlos Rocha-Alvarez, Chen-An Chen | 2003-07-15 |
| 6537733 | Method of depositing low dielectric constant silicon carbide layers | Francimar Campana, Srinivas D. Nemani, Michael Chapin | 2003-03-25 |