Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537733 | Method of depositing low dielectric constant silicon carbide layers | Francimar Campana, Srinivas D. Nemani, Shankar Venkataraman | 2003-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537733 | Method of depositing low dielectric constant silicon carbide layers | Francimar Campana, Srinivas D. Nemani, Shankar Venkataraman | 2003-03-25 |