Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635583 | Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating | Joe Feng, Mei-Yee Shek, Chris Ngai, Judy H. Huang | 2003-10-21 |
| 6573030 | Method for depositing an amorphous carbon layer | Kevin Fairbairn, Michael R. Rice, Timothy Weidman, Christopher S. Ngai, Ian Latchford +1 more | 2003-06-03 |
| 6541397 | Removable amorphous carbon CMP stop | — | 2003-04-01 |