Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656840 | Method for forming silicon containing layers on a substrate | Nagarajan Rajagopalan, Joe Feng, Christopher S. Ngai, Meiyee Shek, Suketu Arun Parikh | 2003-12-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656840 | Method for forming silicon containing layers on a substrate | Nagarajan Rajagopalan, Joe Feng, Christopher S. Ngai, Meiyee Shek, Suketu Arun Parikh | 2003-12-02 |