Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6582175 | Robot for handling semiconductor wafers | Damon K. Cox, Chris Pencis, Jeffrey C. Hudgens, Michael R. Rice | 2003-06-24 |
| 6573522 | Locator pin integrated with sensor for detecting semiconductor substrate carrier | Jeffrey C. Hudgens | 2003-06-03 |