Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6582175 | Robot for handling semiconductor wafers | Damon K. Cox, Martin R. Elliott, Chris Pencis, Michael R. Rice | 2003-06-24 |
| 6573522 | Locator pin integrated with sensor for detecting semiconductor substrate carrier | Martin R. Elliott | 2003-06-03 |
| 6556887 | Method for determining a position of a robot | Marvin L. Freeman, Damon K. Cox, Chris Pencis, Michael R. Rice, David A. Van Gogh | 2003-04-29 |