Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607675 | Method of etching carbon-containing silicon oxide films | Hui Chen, Jie Yuan, Yan Ye | 2003-08-19 |
| 6559942 | Monitoring substrate processing with optical emission and polarized reflected radiation | Zhifeng Sui, Coriolan Frum, Jie Yuan | 2003-05-06 |
| 6547978 | Method of heating a semiconductor substrate | Yan Ye, Allen Zhao, Xiancan Deng, Diana Xiaobing Ma | 2003-04-15 |