Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547978 | Method of heating a semiconductor substrate | Yan Ye, Allen Zhao, Diana Xiaobing Ma, Chang-Lin Hsieh | 2003-04-15 |
| 6534416 | Control of patterned etching in semiconductor features | Yan Ye, Allen Zhao, Diana Xiaobing Ma | 2003-03-18 |