Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547978 | Method of heating a semiconductor substrate | Yan Ye, Xiancan Deng, Diana Xiaobing Ma, Chang-Lin Hsieh | 2003-04-15 |
| 6534416 | Control of patterned etching in semiconductor features | Yan Ye, Xiancan Deng, Diana Xiaobing Ma | 2003-03-18 |
| 6514857 | Damascene structure fabricated using a layer of silicon-based photoresist material | Mehul Naik, Tim Weidman, Dian Sugiarto | 2003-02-04 |