Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583065 | Sidewall polymer forming gas additives for etching processes | Jeffrey D. Chinn, Jitske Trevor, Thorsten Lill, Padmapani Nallan, Tamas Varga +1 more | 2003-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583065 | Sidewall polymer forming gas additives for etching processes | Jeffrey D. Chinn, Jitske Trevor, Thorsten Lill, Padmapani Nallan, Tamas Varga +1 more | 2003-06-24 |