Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642127 | Method for dicing a semiconductor wafer | Ajay Kumar, Padmapani Nallan, Dragan Podlesnik | 2003-11-04 |
| 6642151 | Techniques for plasma etching silicon-germanium | Ajay Kumar, Padmapani Nallan | 2003-11-04 |
| 6593244 | Process for etching conductors at high etch rates | Yiqiong Wang, Ajay Kumar, Dragan Podlesnik, Sharma Pamarthy | 2003-07-15 |
| 6583063 | Plasma etching of silicon using fluorinated gas mixtures | Dragan Podlesnik, Nam Hun Kim, Gene Lee | 2003-06-24 |
| 6518192 | Two etchant etch method | Ajay Kumar, Jeffrey D. Chinn, Dragan Podlesnik | 2003-02-11 |