Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583063 | Plasma etching of silicon using fluorinated gas mixtures | Anisul Khan, Dragan Podlesnik, Nam Hun Kim | 2003-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583063 | Plasma etching of silicon using fluorinated gas mixtures | Anisul Khan, Dragan Podlesnik, Nam Hun Kim | 2003-06-24 |