Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620575 | Construction of built-up structures on the surface of patterned masking used for polysilicon etch | Jeffrey D. Chinn | 2003-09-16 |
| 6583063 | Plasma etching of silicon using fluorinated gas mixtures | Anisul Khan, Dragan Podlesnik, Gene Lee | 2003-06-24 |