Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626185 | Method of depositing a silicon containing layer on a semiconductor substrate | Paul Shufflebotham, Michael Barnes, Huong Nguyen, Brian McMillin, Monique Ben-Dor | 2003-09-30 |