Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646385 | Plasma excitation coil | Arthur M. Howald, Frank Y. Lin | 2003-11-11 |
| 6626185 | Method of depositing a silicon containing layer on a semiconductor substrate | Alex Demos, Paul Shufflebotham, Michael Barnes, Huong Nguyen, Monique Ben-Dor | 2003-09-30 |
| 6508913 | Gas distribution apparatus for semiconductor processing | Robert Knop | 2003-01-21 |