Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646385 | Plasma excitation coil | Arthur M. Howald, Brian McMillin | 2003-11-11 |
| 6617257 | Method of plasma etching organic antireflective coating | Tuqiang Ni, Weinan Jiang, Conan Chiang, Chris Lee, Dai N. Lee | 2003-09-09 |
| 6531029 | Vacuum plasma processor apparatus and method | Tuqiang Ni, Kenji Takeshita, Tom Choi | 2003-03-11 |
| 6514378 | Method for improving uniformity and reducing etch rate variation of etching polysilicon | Tuqiang Ni, Kenji Takeshita, Tom Choi, Wenli Collison | 2003-02-04 |