Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622286 | Integrated electronic hardware for wafer processing control and diagnostic | Tuan Ngo, Farro Kaveh, Connie Lam, Chung-Ho Huang, Anthony Le +1 more | 2003-09-16 |
| 6617257 | Method of plasma etching organic antireflective coating | Weinan Jiang, Conan Chiang, Frank Y. Lin, Chris Lee, Dai N. Lee | 2003-09-09 |
| 6531029 | Vacuum plasma processor apparatus and method | Kenji Takeshita, Tom Choi, Frank Y. Lin | 2003-03-11 |
| 6527911 | Configurable plasma volume etch chamber | Bi-Ming Yen, Lumin Li, David Hemker | 2003-03-04 |
| 6526355 | Integrated full wavelength spectrometer for wafer processing | Tuan Ngo, Chung-Ho Huang, Andrew Lui, Farro Kaveh | 2003-02-25 |
| 6514378 | Method for improving uniformity and reducing etch rate variation of etching polysilicon | Kenji Takeshita, Tom Choi, Frank Y. Lin, Wenli Collison | 2003-02-04 |
| 6503766 | Method and system for detecting an exposure of a material on a semiconductor wafer during chemical-mechanical polishing | — | 2003-01-07 |