Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622286 | Integrated electronic hardware for wafer processing control and diagnostic | Farro Kaveh, Connie Lam, Chung-Ho Huang, Tuqiang Ni, Anthony Le +1 more | 2003-09-16 |
| 6526355 | Integrated full wavelength spectrometer for wafer processing | Tuqiang Ni, Chung-Ho Huang, Andrew Lui, Farro Kaveh | 2003-02-25 |