Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622286 | Integrated electronic hardware for wafer processing control and diagnostic | Tuan Ngo, Farro Kaveh, Connie Lam, Tuqiang Ni, Anthony Le +1 more | 2003-09-16 |
| 6526355 | Integrated full wavelength spectrometer for wafer processing | Tuqiang Ni, Tuan Ngo, Andrew Lui, Farro Kaveh | 2003-02-25 |