BY

Bi-Ming Yen

Lam Research: 1 patents #78 of 202Top 40%
📍 Hsinchu, CA: #20 of 51 inventorsTop 40%
Overall (2003): #256,745 of 273,478Top 95%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6527911 Configurable plasma volume etch chamber Tuqiang Ni, Lumin Li, David Hemker 2003-03-04