Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6527911 | Configurable plasma volume etch chamber | Bi-Ming Yen, Tuqiang Ni, Lumin Li | 2003-03-04 |
| 6528427 | Methods for reducing contamination of semiconductor substrates | Robert Chebi | 2003-03-04 |