Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617257 | Method of plasma etching organic antireflective coating | Tuqiang Ni, Weinan Jiang, Frank Y. Lin, Chris Lee, Dai N. Lee | 2003-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617257 | Method of plasma etching organic antireflective coating | Tuqiang Ni, Weinan Jiang, Frank Y. Lin, Chris Lee, Dai N. Lee | 2003-09-09 |