Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6531029 | Vacuum plasma processor apparatus and method | Tuqiang Ni, Tom Choi, Frank Y. Lin | 2003-03-11 |
| 6514378 | Method for improving uniformity and reducing etch rate variation of etching polysilicon | Tuqiang Ni, Tom Choi, Frank Y. Lin, Wenli Collison | 2003-02-04 |