Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626185 | Method of depositing a silicon containing layer on a semiconductor substrate | Alex Demos, Paul Shufflebotham, Michael Barnes, Brian McMillin, Monique Ben-Dor | 2003-09-30 |
| 6569257 | Method for cleaning a process chamber | Michael Barnes, Li-Qun Xia, Ellie Yieh | 2003-05-27 |
| 6521546 | Method of making a fluoro-organosilicate layer | Michael Barnes, Hichem M'Saad, Farhad Moghadam | 2003-02-18 |
| 6514850 | Interface with dielectric layer and method of making | Li-Qun Xia, Ellie Yieh, Dan Maydan | 2003-02-04 |
| 6511920 | Optical marker layer for etch endpoint determination | Yunsang Kim, Ellie Yieh, Li-Qun Xia | 2003-01-28 |