Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667248 | Low-bias-deposited high-density-plasma chemical-vapor-deposition silicate glass layers | Chad Peterson, Zhuang Li, Anchuan Wang, Farhad Moghadam | 2003-12-23 |
| 6521546 | Method of making a fluoro-organosilicate layer | Michael Barnes, Huong Nguyen, Farhad Moghadam | 2003-02-18 |