Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667248 | Low-bias-deposited high-density-plasma chemical-vapor-deposition silicate glass layers | Hichem M'Saad, Zhuang Li, Anchuan Wang, Farhad Moghadam | 2003-12-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667248 | Low-bias-deposited high-density-plasma chemical-vapor-deposition silicate glass layers | Hichem M'Saad, Zhuang Li, Anchuan Wang, Farhad Moghadam | 2003-12-23 |