Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6598615 | Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber | John Holland, Michael Barnes, Steve S. Y. Mak, Jonathan D. Mohn | 2003-07-29 |