Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656837 | Method of eliminating photoresist poisoning in damascene applications | Li-Qun Xia, Larry Dworkin, Mehul Naik | 2003-12-02 |
| 6553932 | Reduction of plasma edge effect on plasma enhanced CVD processes | Kuo-Shih Liu, Ramana Veerasingam, Zhi Xu, Mario D. Silvetti, Gang Chen | 2003-04-29 |