Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553932 | Reduction of plasma edge effect on plasma enhanced CVD processes | Kuo-Shih Liu, Ramana Veerasingam, Zhi Xu, Ping Xu, Mario D. Silvetti | 2003-04-29 |
| 6546167 | Tunable grating optical device | Stephanus J. Spammer, Laura A. Weller-Brophy | 2003-04-08 |