Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553932 | Reduction of plasma edge effect on plasma enhanced CVD processes | Ramana Veerasingam, Zhi Xu, Ping Xu, Mario D. Silvetti, Gang Chen | 2003-04-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553932 | Reduction of plasma edge effect on plasma enhanced CVD processes | Ramana Veerasingam, Zhi Xu, Ping Xu, Mario D. Silvetti, Gang Chen | 2003-04-29 |