Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2003-10-21 |
| 6612014 | Dual post centrifugal wafer clip for spin rinse dry unit | Bernardo Donoso, Donald Olgado, Alexander Sou-Kang Ko | 2003-09-02 |
| 6613214 | Electric contact element for electrochemical deposition system and method | Yezdi Dordi | 2003-09-02 |
| 6585876 | Flow diffuser to be used in electro-chemical plating system and method | Yezdi Dordi, H. Peter W. Hey, Donald Olgado | 2003-07-01 |
| 6582578 | Method and associated apparatus for tilting a substrate upon entry for metal deposition | Yezdi Dordi, Michael Sugarman | 2003-06-24 |
| 6517130 | Self positioning vacuum chuck | Bernardo Donoso, Donald Olgado, Mark Denome | 2003-02-11 |