Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537011 | Method and apparatus for transferring and supporting a substrate | Danny D. WANG, Dmitry Lubomirsky, Erwin Polar, Brigitte Stoehr, Mark Wiltse +1 more | 2003-03-25 |
| 6516815 | Edge bead removal/spin rinse dry (EBR/SRD) module | Joe Stevens, Donald Olgado, Alex Ko | 2003-02-11 |