Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641701 | Cooling system for magnetron sputtering apparatus | — | 2003-11-04 |
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2003-10-21 |
| 6603269 | Resonant chamber applicator for remote plasma source | Be Van Vo, Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei, Sergio Edelstein +2 more | 2003-08-05 |
| 6571657 | Multiple blade robot adjustment apparatus and associated method | Donald Olgado, Timothy Joseph Franklin | 2003-06-03 |
| 6509069 | Method of reducing the cleaning requirements of a dielectric chuck surface | Robert E. Davenport | 2003-01-21 |