Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6603269 | Resonant chamber applicator for remote plasma source | Be Van Vo, Son Trinh, Lawrence Chung-Lai Lei, Sergio Edelstein, Avi Tepman +2 more | 2003-08-05 |
| 6589352 | Self aligning non contact shadow ring process kit | Joseph Yudovsky, Lawrence Chung-Lai Lei, Tom Madar, Girish Dixit, Gwo-Chuan Tzu | 2003-07-08 |
| 6521292 | Substrate support including purge ring having inner edge aligned to wafer edge | Joseph Yudovsky, Thomas Madar | 2003-02-18 |
| 6517592 | Cold trap assembly | Lawrence Chung-Lai Lei, Russell C. Ellwanger, Ronald L. Rose, Joel M. Huston, James Jin-Long Chen | 2003-02-11 |
| 6503331 | Tungsten chamber with stationary heater | Joseph Yudovsky, Lawrence Chung-Lai Lei | 2003-01-07 |