Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617242 | Method for fabricating interlevel contacts of aluminum/refractory metal alloys | Fusen Chen, Fu-Tai Liou, Timothy E. Turner, Che-Chia Wei, Yih-Shung Lin | 2003-09-09 |
| 6610189 | Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature | Hougong Wang, Bo Zheng, Fusen Chen | 2003-08-26 |
| 6589352 | Self aligning non contact shadow ring process kit | Joseph Yudovsky, Lawrence Chung-Lai Lei, Salvador P. Umotoy, Tom Madar, Gwo-Chuan Tzu | 2003-07-08 |
| 6589865 | Low pressure, low temperature, semiconductor gap filling process | Anthony Konecni, Robert H. Havemann | 2003-07-08 |
| 6566258 | Bi-layer etch stop for inter-level via | Fusen Chen | 2003-05-20 |