Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589352 | Self aligning non contact shadow ring process kit | Lawrence Chung-Lai Lei, Salvador P. Umotoy, Tom Madar, Girish Dixit, Gwo-Chuan Tzu | 2003-07-08 |
| 6555164 | Shadow ring and guide for supporting the shadow ring in a chamber | — | 2003-04-29 |
| 6544340 | Heater with detachable ceramic top plate | — | 2003-04-08 |
| 6521292 | Substrate support including purge ring having inner edge aligned to wafer edge | Salvador P. Umotoy, Thomas Madar | 2003-02-18 |
| 6503331 | Tungsten chamber with stationary heater | Lawrence Chung-Lai Lei, Salvador P. Umotoy | 2003-01-07 |