Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660650 | Selective aluminum plug formation and etchback process | Wei-Yung Hsu, Qi-Zhong Hong | 2003-12-09 |
| 6589865 | Low pressure, low temperature, semiconductor gap filling process | Girish Dixit, Robert H. Havemann | 2003-07-08 |